GEM Driver

Technology overview

QuickGEM Driver 結合既有QuickSECS Driver的功能,可快速完成SEMI E30(GEM) 所要求的通訊能力.

QuickGEM Driver 特點

QuickGEM Driver 於 GEM 規範的相容能力

GEM Compliance Statement
Fundamental GEM Requirements
Support
Equipment Processing States
Host Initiated S1=F13/F14 Scenario
Event Notification
On-Line Identification
Error Messages
Control (Operator Initiated)
Establish Communication Additional Capabilities
Dynamic Event Report Configuration
Variable Data Collection
Trace Data Collection
Status Data Collection
Alarm Management
Remote Control
Equipment Constants
Process Program Management
Equipment Terminal Services Material Movement
Clock
Limits Monitoring  
Spooling ●*1
Control (Host-Initiated)

● Quick GEM支援 | ◎ 提供應用程式範例 |*1 Host 版僅支援 Request Spool Data Message